Cantilever beam electrostatic MEMS actuators beyond pull-in
نویسندگان
چکیده
منابع مشابه
Cantilever beam electrostatic MEMS actuators beyond pull-in
The operational range of electrostatic MEMS parallel plate actuators can be extended beyond pull-in in the presence of an intermediate dielectric layer, which has a significant effect on the behavior of such actuators. Here, we study the behavior of cantilever beam electrostatic actuators beyond pull-in using a beam model along with a dielectric layer. The results from the simple beam model are...
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The analysis of cantilever beams of small dimensions taking into the effect of fringing fields is studied and the parameters are estimated. Extracting the mechanical properties of MEMS devices has always been a challenge in terms of test time and test cost due to difficulties associated with accurate characterization of thin films. A technique for diagnosing the mechanical parameters of a canti...
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The operational range of MEMS electrostatic parallel plate actuators can be extended beyond pull-in with the presence of an intermediate dielectric layer, which has a significant effect on the behavior of such actuators. Here we study the behavior of cantilever beam electrostatic actuators beyond pull-in, using a beam model. Three possible static configurations of the beam are identified over t...
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In this paper we present an electronic circuit for position or capacitance estimation of MEMS electrostatic actuators based on a switched capacitor technique. The circuit uses a capacitive divider configuration composed by a fixed capacitor and the variable capacitance of the electrostatic actuator for generating a signal that is a function of the input voltage and capacitive ratio. The propose...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2006
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/16/9/007